• DocumentCode
    963051
  • Title

    Propagation loss characteristics of long silica-based optical waveguides on 5 inch Si wafers

  • Author

    Hibino, Y. ; Okazaki, Hiroshi ; Hida, Y. ; Ohmori, Yutaka

  • Author_Institution
    Opto-Electron Lab., NTT, Ibaraki, Japan
  • Volume
    29
  • Issue
    21
  • fYear
    1993
  • Firstpage
    1847
  • Lastpage
    1848
  • Abstract
    The propagation loss characteristics of silica-based optical waveguides with various bending curvatures fabricated on 5 inch Si wafers are investigated. Low loss waveguides more than 1 m long with a Delta of 0.75% are successfully fabricated and the loss is found to be independent of the curvature radius over 5 mm. A minimum loss of 3.5 dB/m at approximately 1.55 mu m is obtained in a waveguide 1.6 m long.
  • Keywords
    bending; elemental semiconductors; optical losses; optical waveguides; silicon; silicon compounds; 1.55 micron; 1.6 m; Si; SiO 2-Si; bending curvatures; curvature radius; optical waveguides; propagation loss characteristics;
  • fLanguage
    English
  • Journal_Title
    Electronics Letters
  • Publisher
    iet
  • ISSN
    0013-5194
  • Type

    jour

  • DOI
    10.1049/el:19931229
  • Filename
    241375
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=963051