Title :
Propagation loss characteristics of long silica-based optical waveguides on 5 inch Si wafers
Author :
Hibino, Y. ; Okazaki, Hiroshi ; Hida, Y. ; Ohmori, Yutaka
Author_Institution :
Opto-Electron Lab., NTT, Ibaraki, Japan
Abstract :
The propagation loss characteristics of silica-based optical waveguides with various bending curvatures fabricated on 5 inch Si wafers are investigated. Low loss waveguides more than 1 m long with a Delta of 0.75% are successfully fabricated and the loss is found to be independent of the curvature radius over 5 mm. A minimum loss of 3.5 dB/m at approximately 1.55 mu m is obtained in a waveguide 1.6 m long.
Keywords :
bending; elemental semiconductors; optical losses; optical waveguides; silicon; silicon compounds; 1.55 micron; 1.6 m; Si; SiO 2-Si; bending curvatures; curvature radius; optical waveguides; propagation loss characteristics;
Journal_Title :
Electronics Letters
DOI :
10.1049/el:19931229
