Tunable Dielectric Resonator Bandpass Filter With Embedded MEMS Tuning Elements

This paper presents a novel approach for constructing a tunable dielectric resonator bandpass filter by using the microelectromechanical system (MEMS) technology. The tunability is achieved by unique MEMS tuning elements to perturb the electrical and magnetic fields surrounding the dielectric resonators. The use of such elements as a tuning mechanism results in a wide tuning range at a relatively low tuning voltage and fast tuning speed. A three-pole tunable dielectric resonator bandpass filter is designed, fabricated, and tested. The experimental filter has a center frequency of 15.6 GHz, a 1% relative bandwidth, and an unloaded Q of 1300. A tuning range of 400 MHz is obtained by using MEMS tuning elements with 2 mmtimes2 mm tuning disks. The measured results demonstrate the feasibility of the proposed concept