Principles and Methodology for the Simultaneous Determination of Thickness and Dielectric Constant of Coatings With Capacitance Measurements

We propose a new methodology to measure both the dielectric constant and thickness of dielectric coatings on a flat conducting substrate from two capacitance measurements. We discuss the principles of the method and demonstrate its feasibility using 2-D numerical simulations. We present a proof of principles experiment confirming the viability of the method in practice. Finally, we propose and analyze a multisphere electrode geometry