Title :
Interdigital sensors and transducers
Author :
Mamishev, Alexander V. ; Sundara-Rajan, Kishore ; Yang, Fumin ; Du, Yanqing ; Zahn, Markus
Author_Institution :
Dept. of Electr. Eng., Univ. of Washington, Seattle, WA, USA
fDate :
5/1/2004 12:00:00 AM
Abstract :
This review paper focuses on interdigital electrodes-a geometric structure encountered in a wide variety of sensor and transducer designs. Physical and chemical principles behind the operation of these devices vary so much across different fields of science and technology that the common features present in all devices are often overlooked. This paper attempts to bring under one umbrella capacitive, inductive, dielectric, piezoacoustic, chemical, biological, and microelectromechanical interdigital sensors and transducers. The paper also provides historical perspective, discusses fabrication techniques, modeling of sensor parameters, application examples, and directions of future research.
Keywords :
capacitive sensors; electrodes; interdigital transducers; microsensors; nondestructive testing; reviews; surface acoustic wave sensors; surface acoustic wave transducers; biological sensors; capacitive sensors; chemical sensors; dielectric sensors; dielectrometry imagers; fabrication techniques; inductive sensors; interdigital electrodes; interdigital sensors; interdigital transducers; microelectromechanical sensors; modeling; nondestructive testing; piezoacoustic sensors; sensor parameters; surface acoustic waves; Acoustic sensors; Biosensors; Capacitive sensors; Chemical and biological sensors; Chemical technology; Dielectrics; Electrodes; Micromechanical devices; Parameter estimation; Transducers;
Journal_Title :
Proceedings of the IEEE
DOI :
10.1109/JPROC.2004.826603
