Statistical control of VLSI fabrication processes. II. A software system

Author

Shyamsundar, C.R. ; Mozumder, Purnendu K. ; Strojwas, Andrzej J.

Author_Institution

Dept. of Electr. & Comput. Eng., Carnegie-Mellon Univ., Pittsburgh, PA, USA

Volume

1

Issue

2

fYear

1988

fDate

5/1/1988 12:00:00 AM

Firstpage

72

Lastpage

82

Abstract

For pt.I see ibid., vol.1, no.2, p.62-71, 1988. The algorithms used to implement the CMU-CAM statistical control system for VLSI integrated circuit fabrication are presented. The CMU-CAM system performs three major operations: modeling; quality control; and feed-forward control. In order to increase the efficiency of modeling and control, the problem is decomposed using statistical factorization techniques. Algorithms for process modeling and algorithms used in quality control and feed-forward control are described. The CMU-CAM system performs profit maximization through statistical process control. Its capabilities are illustrated by a number of computational examples

Keywords

VLSI; electronic engineering computing; integrated circuit manufacture; manufacturing data processing; process computer control; quality control; CMU-CAM system; IC production; VLSI fabrication processes; computer aided manufacture; feed-forward control; modeling; process control; profit maximization; quality control; software system; statistical control system; statistical factorization techniques; Clustering algorithms; Control systems; Fabrication; Feeds; Process control; Quality control; Software algorithms; Software performance; Software systems; Very large scale integration;

fLanguage

English

Journal_Title

Semiconductor Manufacturing, IEEE Transactions on

Publisher

ieee

ISSN

0894-6507

Type

jour

DOI

10.1109/66.4376

Filename

4376