• DocumentCode
    964836
  • Title

    Low Firing Temperature Multilayer Glass-Ceramic Substrate

  • Author

    Shimada, Yuzo ; Utsumi, Kazuaki ; Suzuki, M. ; Takamizawa, Hideo ; Nitta, Mitsuru ; Watari, Toshihiko

  • Author_Institution
    NEC Corporation, Kawasaki-city, Japan
  • Volume
    6
  • Issue
    4
  • fYear
    1983
  • fDate
    12/1/1983 12:00:00 AM
  • Firstpage
    382
  • Lastpage
    388
  • Abstract
    A glass-ceramic material, which has a low constant
  • Keywords
    Ceramic materials/devices; Glass materials/devices; Integrated circuit packaging; Large-scale integration; Atmosphere; Dielectric constant; Firing; Nonhomogeneous media; Packaging; Propagation delay; Silicon; Substrates; Temperature; Thermal expansion;
  • fLanguage
    English
  • Journal_Title
    Components, Hybrids, and Manufacturing Technology, IEEE Transactions on
  • Publisher
    ieee
  • ISSN
    0148-6411
  • Type

    jour

  • DOI
    10.1109/TCHMT.1983.1136194
  • Filename
    1136194
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=964836