Title :
Low Firing Temperature Multilayer Glass-Ceramic Substrate
Author :
Shimada, Yuzo ; Utsumi, Kazuaki ; Suzuki, M. ; Takamizawa, Hideo ; Nitta, Mitsuru ; Watari, Toshihiko
Author_Institution :
NEC Corporation, Kawasaki-city, Japan
fDate :
12/1/1983 12:00:00 AM
Abstract :
A glass-ceramic material, which has a low constant
Keywords :
Ceramic materials/devices; Glass materials/devices; Integrated circuit packaging; Large-scale integration; Atmosphere; Dielectric constant; Firing; Nonhomogeneous media; Packaging; Propagation delay; Silicon; Substrates; Temperature; Thermal expansion;
Journal_Title :
Components, Hybrids, and Manufacturing Technology, IEEE Transactions on
DOI :
10.1109/TCHMT.1983.1136194
