DocumentCode
965441
Title
Choice of epitaxial structure to promote performance and uniformity of GaAs/AlGaAs heterojunction bipolar transistors grown by MOVPE
Author
Westergren, Urban ; Billen, B.
Author_Institution
Swedish Inst. of Microelectron., Kista, Sweden
Volume
39
Issue
5
fYear
1992
fDate
5/1/1992 12:00:00 AM
Firstpage
1056
Lastpage
1062
Abstract
Numerical simulations with a one-dimensional physical device model are used to investigate the importance of the design of the emitter and base regions of n-p-n GaAs/AlGaAs HBT structures. A structure of optimum gain and speed is determined together with limits for the variations of the aluminum gradings and doping placement. The simulations show that the edge of the base doping on the emitter side has to be controlled within a few nanometers to avoid serious degradations of the current gain and the cutoff frequency. Variation in the position of the base doping relative to the aluminum gradings is a plausible source of the spread in current gain observed in measurements of devices made by metalorganic vapor-phase epitaxy (MOVPE). It is predicted that longer emitter aluminum gradings will reduce the sensitivity to these variations together with the peak values of gain and speed. It is suggested that the grading length be chosen as a compromise between performance and uniformity depending on the accuracy of the manufacturing method and the demands of the application
Keywords
III-V semiconductors; aluminium compounds; gallium arsenide; heterojunction bipolar transistors; semiconductor device models; semiconductor epitaxial layers; semiconductor growth; vapour phase epitaxial growth; Al grading; GaAs-AlGaAs; HBT; MOVPE; base doping; base regions; current gain; cutoff frequency; doping placement; emitter region; epitaxial structure; grading length; heterojunction bipolar transistors; n-p-n transistors; performance; physical device model; semiconductors; uniformity; Aluminum; Current measurement; Cutoff frequency; Degradation; Doping; Epitaxial growth; Gallium arsenide; Heterojunction bipolar transistors; Numerical simulation; Semiconductor process modeling;
fLanguage
English
Journal_Title
Electron Devices, IEEE Transactions on
Publisher
ieee
ISSN
0018-9383
Type
jour
DOI
10.1109/16.129082
Filename
129082
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