DocumentCode
965950
Title
Microsensations
Author
Gardner, Julian William
Author_Institution
Warwick Univ., Coventry, UK
Volume
41
Issue
5
fYear
1995
fDate
9/21/1995 12:00:00 AM
Firstpage
185
Lastpage
188
Abstract
It is no exaggeration to say that all industrial processes-and a good many everyday domestic ones-use measurement at some level and a great many use electronic measurement systems. At the heart of any electronic measurement is a sensor-a device that converts a physical or chemical quantity (e.g. pressure, humidity) into an electrical signal. Here, the author describes how silicon fabrication processes are being adapted to produce miniature sensors so cheaply that a revolution is taking place in the field of instrumentation
Keywords
computerised instrumentation; electric sensing devices; elemental semiconductors; microsensors; silicon; Si; chemical quantity; electrical signal; electronic measurement systems; instrumentation; miniature sensors; physical quantity; silicon fabrication processes;
fLanguage
English
Journal_Title
IEE Review
Publisher
iet
ISSN
0953-5683
Type
jour
DOI
10.1049/ir:19950501
Filename
466001
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