DocumentCode :
965950
Title :
Microsensations
Author :
Gardner, Julian William
Author_Institution :
Warwick Univ., Coventry, UK
Volume :
41
Issue :
5
fYear :
1995
fDate :
9/21/1995 12:00:00 AM
Firstpage :
185
Lastpage :
188
Abstract :
It is no exaggeration to say that all industrial processes-and a good many everyday domestic ones-use measurement at some level and a great many use electronic measurement systems. At the heart of any electronic measurement is a sensor-a device that converts a physical or chemical quantity (e.g. pressure, humidity) into an electrical signal. Here, the author describes how silicon fabrication processes are being adapted to produce miniature sensors so cheaply that a revolution is taking place in the field of instrumentation
Keywords :
computerised instrumentation; electric sensing devices; elemental semiconductors; microsensors; silicon; Si; chemical quantity; electrical signal; electronic measurement systems; instrumentation; miniature sensors; physical quantity; silicon fabrication processes;
fLanguage :
English
Journal_Title :
IEE Review
Publisher :
iet
ISSN :
0953-5683
Type :
jour
DOI :
10.1049/ir:19950501
Filename :
466001
Link To Document :
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