Title :
Integrated silicon anemometer
Author :
Putten, A. F P Van ; Middelhoek, S.
Author_Institution :
Delft University of Technology, Electrical Materials Laboratory, Department of Electrical Engineering, Delft, Netherlands
Abstract :
At present, planar silicon technology allows one to construct very sophisticated integrated circuits for the processing of electronic signals. In the letter, an integrated silicon sensor for the measurement of gas flow is introduced.
Keywords :
anemometers; flow measurement; monolithic integrated circuits; transducers; anemometers; monolithic integrated circuits; transducers;
Journal_Title :
Electronics Letters
DOI :
10.1049/el:19740339
