• DocumentCode
    966037
  • Title

    Integrated silicon anemometer

  • Author

    Putten, A. F P Van ; Middelhoek, S.

  • Author_Institution
    Delft University of Technology, Electrical Materials Laboratory, Department of Electrical Engineering, Delft, Netherlands
  • Volume
    10
  • Issue
    21
  • fYear
    1974
  • Firstpage
    425
  • Lastpage
    426
  • Abstract
    At present, planar silicon technology allows one to construct very sophisticated integrated circuits for the processing of electronic signals. In the letter, an integrated silicon sensor for the measurement of gas flow is introduced.
  • Keywords
    anemometers; flow measurement; monolithic integrated circuits; transducers; anemometers; monolithic integrated circuits; transducers;
  • fLanguage
    English
  • Journal_Title
    Electronics Letters
  • Publisher
    iet
  • ISSN
    0013-5194
  • Type

    jour

  • DOI
    10.1049/el:19740339
  • Filename
    4245225
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=966037