DocumentCode :
966064
Title :
Micro-materials processing
Author :
Cohen, Martin G. ; Kaplan, Robert A. ; Arthurs, Eugene G.
Author_Institution :
Quantronix Corporation, Smithtown, NY
Volume :
70
Issue :
6
fYear :
1982
fDate :
6/1/1982 12:00:00 AM
Firstpage :
545
Lastpage :
555
Abstract :
In the years since its discovery and early development in the 1960\´s, the laser has found increasing acceptance as a production tool. Its unique features, Which allow for the rapid delivery of precisely controlled amounts of energy with high spatial accuracy to a work surface, have made it the instrument of choice over competing technologies for many applications. In some instances, "doing it" by laser is the only way, especially in the semiconductor industry where the miniaturizing effects of very large scale integration (VLSI) demand the ability to process material on a microscopic scale. In this paper, a physical basis for the success of the laser as a micro-materials processing tool will be established. Several applications from the electronics and semiconductor industries will then be discussed. The paper will conclude with a little-known application in the diamond industry.
Keywords :
Electronics industry; Industrial electronics; Instruments; Laser theory; Microscopy; Optical materials; Production; Semiconductor lasers; Semiconductor materials; Very large scale integration;
fLanguage :
English
Journal_Title :
Proceedings of the IEEE
Publisher :
ieee
ISSN :
0018-9219
Type :
jour
DOI :
10.1109/PROC.1982.12353
Filename :
1456621
Link To Document :
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