DocumentCode
966147
Title
Laser scanning microscopy
Author
Alford, W. Jerry ; Vanderneut, Richard D. ; Zaleckas, Vincent J.
Author_Institution
Ford Aerospace and Communications Corporation, Process Control Products Operation, Charlotte, NC
Volume
70
Issue
6
fYear
1982
fDate
6/1/1982 12:00:00 AM
Firstpage
641
Lastpage
651
Abstract
In conventional light microscopy, images are formed either by direct imaging of the object at a desired magnification or by imaging the object onto a remote surface and converting the illuminance at that surface to an electrical signal. In laser scanning microscopy, the object or specimen surface is scanned point by point by a focused laser beam. The actual image or other pertinent characteristic of the object is then generated by an electronic system. Use of such scanned laser systems exists today in biomedical research, in the semiconductor microelectronics industry, and in varied other industrial inspection applications. In this paper, we review the basic principles of laser scanning microscopy, discuss advantages as compared to more conventional light microscopy, and illustrate the technique with examples of systems in use today.
Keywords
Focusing; High-resolution imaging; Image converters; Laser beams; Laser theory; Microscopy; Object detection; Semiconductor lasers; Surface emitting lasers; Surface topography;
fLanguage
English
Journal_Title
Proceedings of the IEEE
Publisher
ieee
ISSN
0018-9219
Type
jour
DOI
10.1109/PROC.1982.12362
Filename
1456630
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