• DocumentCode
    966147
  • Title

    Laser scanning microscopy

  • Author

    Alford, W. Jerry ; Vanderneut, Richard D. ; Zaleckas, Vincent J.

  • Author_Institution
    Ford Aerospace and Communications Corporation, Process Control Products Operation, Charlotte, NC
  • Volume
    70
  • Issue
    6
  • fYear
    1982
  • fDate
    6/1/1982 12:00:00 AM
  • Firstpage
    641
  • Lastpage
    651
  • Abstract
    In conventional light microscopy, images are formed either by direct imaging of the object at a desired magnification or by imaging the object onto a remote surface and converting the illuminance at that surface to an electrical signal. In laser scanning microscopy, the object or specimen surface is scanned point by point by a focused laser beam. The actual image or other pertinent characteristic of the object is then generated by an electronic system. Use of such scanned laser systems exists today in biomedical research, in the semiconductor microelectronics industry, and in varied other industrial inspection applications. In this paper, we review the basic principles of laser scanning microscopy, discuss advantages as compared to more conventional light microscopy, and illustrate the technique with examples of systems in use today.
  • Keywords
    Focusing; High-resolution imaging; Image converters; Laser beams; Laser theory; Microscopy; Object detection; Semiconductor lasers; Surface emitting lasers; Surface topography;
  • fLanguage
    English
  • Journal_Title
    Proceedings of the IEEE
  • Publisher
    ieee
  • ISSN
    0018-9219
  • Type

    jour

  • DOI
    10.1109/PROC.1982.12362
  • Filename
    1456630