DocumentCode
966419
Title
Silicon-On-Silicon Packaging
Author
Spielberger, R.K. ; Huang, Charles D. ; Nunne, William H. ; Mones, A.H. ; Fett, Darrell L. ; Hampton, Freddie L.
Author_Institution
Honeywell, Inc., Plymouth, MN, USA
Volume
7
Issue
2
fYear
1984
fDate
6/1/1984 12:00:00 AM
Firstpage
193
Lastpage
196
Abstract
Honeywell´s new packaging technique uses silicon as a multichip substrate. Multiple integrated circuit (IC) chips are flip bonded by controlled collapse joining to a silicon substrate. The silicon substratc provides the interconnections between chips and the next level of interface. The silicon substrate is subseqently epoxy bonded to a ceramic substrate, and the package is then completed by wire bonding and hermetic sealing. Silicon-on-silicon packaging offers six advantages: 1) excellent thermal matching, 2) high packaging density, 3) commonality of fabrication using conventional IC processes, 4) low cost per function, 5) repairability, 6) and mixing of IC technologies (MOS bipolar linear, etc.) on the same silicon substrate.
Keywords
Integrated circuit packaging; Bonding; Ceramics; Electronics packaging; Flip chip; Integrated circuit interconnections; Integrated circuit packaging; Packaging machines; Silicon; Substrates; Wire;
fLanguage
English
Journal_Title
Components, Hybrids, and Manufacturing Technology, IEEE Transactions on
Publisher
ieee
ISSN
0148-6411
Type
jour
DOI
10.1109/TCHMT.1984.1136347
Filename
1136347
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