• DocumentCode
    966419
  • Title

    Silicon-On-Silicon Packaging

  • Author

    Spielberger, R.K. ; Huang, Charles D. ; Nunne, William H. ; Mones, A.H. ; Fett, Darrell L. ; Hampton, Freddie L.

  • Author_Institution
    Honeywell, Inc., Plymouth, MN, USA
  • Volume
    7
  • Issue
    2
  • fYear
    1984
  • fDate
    6/1/1984 12:00:00 AM
  • Firstpage
    193
  • Lastpage
    196
  • Abstract
    Honeywell´s new packaging technique uses silicon as a multichip substrate. Multiple integrated circuit (IC) chips are flip bonded by controlled collapse joining to a silicon substrate. The silicon substratc provides the interconnections between chips and the next level of interface. The silicon substrate is subseqently epoxy bonded to a ceramic substrate, and the package is then completed by wire bonding and hermetic sealing. Silicon-on-silicon packaging offers six advantages: 1) excellent thermal matching, 2) high packaging density, 3) commonality of fabrication using conventional IC processes, 4) low cost per function, 5) repairability, 6) and mixing of IC technologies (MOS bipolar linear, etc.) on the same silicon substrate.
  • Keywords
    Integrated circuit packaging; Bonding; Ceramics; Electronics packaging; Flip chip; Integrated circuit interconnections; Integrated circuit packaging; Packaging machines; Silicon; Substrates; Wire;
  • fLanguage
    English
  • Journal_Title
    Components, Hybrids, and Manufacturing Technology, IEEE Transactions on
  • Publisher
    ieee
  • ISSN
    0148-6411
  • Type

    jour

  • DOI
    10.1109/TCHMT.1984.1136347
  • Filename
    1136347