Title :
V-shaped notched-channel field-effect transistor
Author :
Mok, T.D. ; Salama, C.A.T.
Author_Institution :
University of Toronto, Department of Electrical Engineering, Toronto, Canada
Abstract :
A junction field-effect transistor with a V-shaped notched channel fabricated by preferential etching of (100) silicon is described. This transistor exhibits a higher maximum transconductance and a lower turn-on resistance than conventional silicon f.e.t.s. with rectangular channels. The fabrication, characteristics and possible applications of this device are described.
Keywords :
field effect transistors; V-shaped notched channel JFET; preferential etching; transconductance;
Journal_Title :
Electronics Letters
DOI :
10.1049/el:19740381