Title :
A Design Procedure for High-Performance, Rib-Waveguide-Based Multimode Interference Couplers in Silicon-on-Insulator
Author :
Halir, Robert ; Molina-Fernández, I. ; Ortega-Moñux, A. ; Wangüemert-Pérez, J.G. ; Xu, Dan-Xia ; Cheben, Pavel ; Janz, Siegfried
Author_Institution :
Dept. de Ing. de Comuniciones, Univ. de Malaga, Malaga
Abstract :
Single mode silicon-on-insulator rib waveguides offer a weak lateral confinement, which makes it difficult to design high-performance multimode interference couplers (MMIs) based on these waveguides. Here, a complete design procedure for single etch step MMIs with tapered rib access waveguides is presented, which yields low excess loss (0.1 dB) and good imbalance (0.02 dB). Furthermore, polarization dependence is low, and high fabrication tolerances are achieved, especially with respect to etch depth.
Keywords :
etching; integrated optoelectronics; light interference; light polarisation; optical couplers; optical design techniques; optical fabrication; optical planar waveguides; rib waveguides; silicon-on-insulator; Si-SiO2; etch depth; high fabrication tolerance; photonic lightwave circuits; polarization dependence; rib-waveguide-based multimode interference couplers; single mode silicon-on-insulator rib waveguides; tapered rib access waveguides; Algorithm design and analysis; Couplers; Etching; Interference; Optical device fabrication; Optical losses; Optical waveguides; Programmable control; Silicon on insulator technology; Waveguide transitions; Design; multimode interference (MMI); rib waveguide; silicon-on-insulator;
Journal_Title :
Lightwave Technology, Journal of
DOI :
10.1109/JLT.2007.914511
