Title :
Electron Beam Cutting Techniques for Electronic Applications
Author :
Schollhammer, F.R.
Author_Institution :
United Aircraft Corporation
fDate :
4/1/1963 12:00:00 AM
Abstract :
The advantages of electron beam cutting are outlined. Specific production applications of these cutting techniques to electronic packaging are discussed in detail. Examples presented include: the etching of micro components; the scribing of thin films; the drilling and cutting of precision holes and slots in ceramic components; and the use of the electron beam cutter as a salvage tool.
Keywords :
Acceleration; Aerospace electronics; Cathodes; Drilling; Electron beams; Electron optics; Electronics packaging; Kinetic energy; Plasma temperature; Welding;
Journal_Title :
Product Engineering and Production, IEEE Transactions on
DOI :
10.1109/TPEP.1963.1136395