Title :
Vacuum Deposition Techniques in an Engineering Laboratory Facility for Producing Thin Film Integrated Circuits
Author_Institution :
Motorola Inc.
fDate :
7/1/1963 12:00:00 AM
Keywords :
Capacitors; Laboratories; Resistors; Sputtering; Substrates; Temperature control; Thickness control; Thin film circuits; Vacuum technology; Voltage-controlled oscillators;
Journal_Title :
Product Engineering and Production, IEEE Transactions on
DOI :
10.1109/TPEP.1963.1136403
