• DocumentCode
    967501
  • Title

    Ion beam oxidation of Nb-based Josephson junctions

  • Author

    Herwig, R.

  • Author_Institution
    Universitÿt Karlsrÿhe, Institut fÿr Elektrotechnische Grundlagen der Informatik, Karlsrÿhe, West Germany
  • Volume
    16
  • Issue
    22
  • fYear
    1980
  • Firstpage
    850
  • Lastpage
    851
  • Abstract
    Ion beam oxidation and structuring of Nb-based planar Josephson junctions are briefly described and preliminary results are presented.
  • Keywords
    Josephson effect; oxidation; superconducting junction devices; Nb based Josephson junctions; ion beam oxidation;
  • fLanguage
    English
  • Journal_Title
    Electronics Letters
  • Publisher
    iet
  • ISSN
    0013-5194
  • Type

    jour

  • DOI
    10.1049/el:19800604
  • Filename
    4245376