Title :
Ion beam oxidation of Nb-based Josephson junctions
Author_Institution :
Universitÿt Karlsrÿhe, Institut fÿr Elektrotechnische Grundlagen der Informatik, Karlsrÿhe, West Germany
Abstract :
Ion beam oxidation and structuring of Nb-based planar Josephson junctions are briefly described and preliminary results are presented.
Keywords :
Josephson effect; oxidation; superconducting junction devices; Nb based Josephson junctions; ion beam oxidation;
Journal_Title :
Electronics Letters
DOI :
10.1049/el:19800604
