Title :
Low-loss SOI photonic wires and ring resonators fabricated with deep UV lithography
Author :
Dumon, Pieter ; Bogaerts, Wim ; Wiaux, Vincent ; Wouters, Johan ; Beckx, Stephan ; Van Campenhout, Joris ; Taillaert, Dirk ; Luyssaert, Bert ; Bienstman, Peter ; Van Thourhout, Dries ; Baets, Roel
Author_Institution :
Dept. of Inf. Technol., Ghent Univ.-IMEC, Gent, Belgium
fDate :
5/1/2004 12:00:00 AM
Abstract :
We demonstrate single-mode photonic wires in silicon-on-insulator with propagation loss as low as 2.4 dB/cm, fabricated with deep ultraviolet lithography and dry etching. We have also made compact racetrack and ring resonators functioning as add-drop filters, attaining Q values larger than 3000 and low add-drop crosstalk.
Keywords :
elemental semiconductors; etching; integrated optics; optical crosstalk; optical fabrication; optical losses; optical resonators; optical waveguide filters; optical waveguides; silicon; silicon-on-insulator; ultraviolet lithography; Si; Si-SiO2; add-drop filters; deep UV lithography; deep ultraviolet lithography; dry etching; low add-drop crosstalk; low-loss SOI photonic wires; low-loss waveguide; propagation loss; racetrack; ring resonators fabrication; silicon-on-insulator; single-mode photonic wires; Etching; Fabrication; Lithography; Optical losses; Optical ring resonators; Particle scattering; Photonics; Propagation losses; Silicon on insulator technology; Wires;
Journal_Title :
Photonics Technology Letters, IEEE
DOI :
10.1109/LPT.2004.826025
