Low-loss SOI photonic wires and ring resonators fabricated with deep UV lithography

Author

Dumon, Pieter ; Bogaerts, Wim ; Wiaux, Vincent ; Wouters, Johan ; Beckx, Stephan ; Van Campenhout, Joris ; Taillaert, Dirk ; Luyssaert, Bert ; Bienstman, Peter ; Van Thourhout, Dries ; Baets, Roel

Author_Institution

Dept. of Inf. Technol., Ghent Univ.-IMEC, Gent, Belgium

Volume

16

Issue

5

fYear

2004

fDate

5/1/2004 12:00:00 AM

Firstpage

1328

Lastpage

1330

Abstract

We demonstrate single-mode photonic wires in silicon-on-insulator with propagation loss as low as 2.4 dB/cm, fabricated with deep ultraviolet lithography and dry etching. We have also made compact racetrack and ring resonators functioning as add-drop filters, attaining Q values larger than 3000 and low add-drop crosstalk.

Keywords

elemental semiconductors; etching; integrated optics; optical crosstalk; optical fabrication; optical losses; optical resonators; optical waveguide filters; optical waveguides; silicon; silicon-on-insulator; ultraviolet lithography; Si; Si-SiO₂; add-drop filters; deep UV lithography; deep ultraviolet lithography; dry etching; low add-drop crosstalk; low-loss SOI photonic wires; low-loss waveguide; propagation loss; racetrack; ring resonators fabrication; silicon-on-insulator; single-mode photonic wires; Etching; Fabrication; Lithography; Optical losses; Optical ring resonators; Particle scattering; Photonics; Propagation losses; Silicon on insulator technology; Wires;

fLanguage

English

Journal_Title

Photonics Technology Letters, IEEE

Publisher

ieee

ISSN

1041-1135

Type

jour

DOI

10.1109/LPT.2004.826025

Filename

1291500