• DocumentCode
    967725
  • Title

    Interfacial layer formation in the vacuum-deposited aluminum/YZ lithium niobate

  • Author

    Singh, Awatar

  • Author_Institution
    CEERI, Pilani, India
  • Volume
    70
  • Issue
    12
  • fYear
    1982
  • Firstpage
    1458
  • Lastpage
    1458
  • Abstract
    The vacuum-deposited Al/YZ LiNbO3interface has been studied by fabricating a surface acoustic wave (SAW) color-TV IF filter for the European PAL standard with 38.9-MHz vision carrier. An interfacial layer is formed whenever Al is deposited on the LiNbO3surface. This interfacial layer, which is attributed to the reaction product of aluminum with lithium niobate, causes the positive shift in the frequency response.
  • Keywords
    Aluminum; Dielectric thin films; Etching; Fabrication; Filters; Frequency response; Lithium niobate; Rough surfaces; Surface acoustic wave devices; Surface acoustic waves;
  • fLanguage
    English
  • Journal_Title
    Proceedings of the IEEE
  • Publisher
    ieee
  • ISSN
    0018-9219
  • Type

    jour

  • DOI
    10.1109/PROC.1982.12510
  • Filename
    1456778
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=967725