Title :
Measurement of s.a.w. device stripe/period ratio using optical diffraction
Author :
Chapman, C.W. ; Judd, G.W.
Author_Institution :
Hughes Aircraft Co., Fullerton, USA
Abstract :
The stripe/period ratio of periodic s.a.w. device masks has been determined by measuring the intensity of the diffraction maxima obtained when a laser beam is transmitted through the mask. Correlation of measured data with theoretical results is excellent. The technique can also be used to measure the stripe/period ratio on actual s.a.w. devices.
Keywords :
light diffraction; masks; measurement by laser beam; surface acoustic wave devices; measurement by laser beam; optical diffraction; stripe period ratio; surface acoustic wave device;
Journal_Title :
Electronics Letters
DOI :
10.1049/el:19800678
