• DocumentCode
    968267
  • Title

    Measurement of s.a.w. device stripe/period ratio using optical diffraction

  • Author

    Chapman, C.W. ; Judd, G.W.

  • Author_Institution
    Hughes Aircraft Co., Fullerton, USA
  • Volume
    16
  • Issue
    25
  • fYear
    1980
  • Firstpage
    952
  • Lastpage
    953
  • Abstract
    The stripe/period ratio of periodic s.a.w. device masks has been determined by measuring the intensity of the diffraction maxima obtained when a laser beam is transmitted through the mask. Correlation of measured data with theoretical results is excellent. The technique can also be used to measure the stripe/period ratio on actual s.a.w. devices.
  • Keywords
    light diffraction; masks; measurement by laser beam; surface acoustic wave devices; measurement by laser beam; optical diffraction; stripe period ratio; surface acoustic wave device;
  • fLanguage
    English
  • Journal_Title
    Electronics Letters
  • Publisher
    iet
  • ISSN
    0013-5194
  • Type

    jour

  • DOI
    10.1049/el:19800678
  • Filename
    4245453
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=968267