Title :
Broad bandwidth concave transducer for scanning acoustic microscope
Author :
Kushibiki, J. ; Sannomiya, T. ; Chubachi, N.
Author_Institution :
Tohoku University, Department of Electrical Engineering, Faculty of Engineering, Sendai, Japan
Abstract :
To broaden the bandwidth of ZnO-film/Au-substrate concave transducers in composite resonating mode operation, a quarter-wavelength matching layer is introduced between the concaved Au-substrate surface and the water. By using a SiO2 film as the matching layer, a new ZnO-film concave transducer with a sufficiently broad bandwidth for use in an acoustic microscope is demonstrated at 150 MHz.
Keywords :
acoustic microscopes; gold; ultrasonic transducers; zinc compounds; SiO2 film; ZnO film/Au substrate transducer; composite resonating mode; concave transducer; scanning acoustic microscope;
Journal_Title :
Electronics Letters
DOI :
10.1049/el:19810031
