Title :
Development of a slot-excited planar microwave discharge device for uniform plasma processing
Author :
Yasaka, Yasuyoshi ; Ishii, Nobuo ; Yamamoto, Tetsuya ; Ando, Makoto ; Takahashi, Masaharu
Author_Institution :
Dept. of Electr. Eng., Maizuru Nat. Coll. of Technol., Kyoto, Japan
Abstract :
Planar microwave discharges using a multislotted planar antenna are investigated. A three-dimensional finite-difference time-domain code is developed for the calculation of wave propagation in nonuniform plasmas. The enhancement of the microwave fields near the plasma resonance is revealed in accordance with the theory of the resonant absorption. The global wave electric field is obtained for various excitation modes of the antenna. By operating the antenna with transverse electric mode, where the field is rotating in the azimuthal direction, and by minimizing the reflected power from the antenna, highly uniform overdense plasmas can be produced in a wide range of gas pressures and microwave powers.
Keywords :
antennas in plasma; finite difference methods; high-frequency discharges; microwave antennas; plasma density; plasma electromagnetic wave propagation; plasma instability; plasma materials processing; plasma oscillations; plasma simulation; slot antennas; 3D finite-difference time-domain code; antenna excitation mode; gas pressure; global wave electric field; microwave power; multislotted planar antenna; plasma resonance; resonant absorption theory; slot-excited planar microwave discharge device; uniform plasma processing; Antennas and propagation; Directive antennas; Microwave antennas; Microwave devices; Planar arrays; Plasma devices; Plasma materials processing; Plasma waves; Reflector antennas; Resonance;
Journal_Title :
Plasma Science, IEEE Transactions on
DOI :
10.1109/TPS.2004.823977
