DocumentCode
968937
Title
A Survey of Semiconductor Materials Technology
Author
Myer, Jon H.
Author_Institution
Semiconductor Div,California.
Volume
8
Issue
2
fYear
1961
fDate
6/1/1961 12:00:00 AM
Firstpage
65
Lastpage
69
Abstract
A survey of the techniques used in the preparation and evaluation of semiconductor materials is presented. The various processes for the preparation and growth of crystals are described, and an outline of their relative merits is given. Crystalgrowth records must be maintained to permit control of yield from subsequent manufacturing processes.
Keywords
Boats; Crystals; Furnaces; Germanium; Manufacturing processes; Production; Semiconductor device manufacture; Semiconductor devices; Semiconductor materials; Silicon;
fLanguage
English
Journal_Title
Component Parts, IRE Transactions on
Publisher
ieee
ISSN
0096-2422
Type
jour
DOI
10.1109/TCP.1961.1136595
Filename
1136595
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