DocumentCode
969051
Title
Advanced submicron research and technology development at the national submicron facility
Author
Wolf, E.D. ; Adesida, I. ; Ballantyne, J.M. ; Buhrman, R.A. ; Chinn, J.D. ; Eastman, L.F. ; Everhart, T. ; Frey, Jesse ; Hanson, G.R. ; Isaacson, M.S. ; Krusius, J.P. ; Sonek, G.J. ; Wicks, G.W. ; Wood, C.E.C.
Volume
71
Issue
5
fYear
1983
fDate
5/1/1983 12:00:00 AM
Firstpage
589
Lastpage
600
Keywords
Construction industry; Electronics industry; Electrons; Fabrication; Government; Industrial electronics; Laboratories; Microstructure; Physics; Solid state circuits;
fLanguage
English
Journal_Title
Proceedings of the IEEE
Publisher
ieee
ISSN
0018-9219
Type
jour
DOI
10.1109/PROC.1983.12643
Filename
1456911
Link To Document