Title :
A systems approach to 1-µm NMOS
Author :
Lepselter, Martin P. ; Alles, David S. ; Levinstein, Hyman J. ; Smith, George Elwood ; Watson, Hugh A.
Author_Institution :
Bell Laboratories, Murray Hill, NJ
fDate :
5/1/1983 12:00:00 AM
Abstract :
In 1977, groups from diverse disciplines at Bell Labs were brought together for the first time, with the goal of applying a systems approach to high-performance NMOS technology. These groups, namely, solid-state physics, device design, materials, processing, and lithography found a symbiotic relationship that has produced not only NMOS devices with unparalleled performance, but also improved materials, processes, and tools-many of which are in production today.
Keywords :
Conducting materials; Fabrication; Laboratories; Lithography; MOS devices; Scanning electron microscopy; Solid modeling; Solid state circuits; Testing; Transmission electron microscopy;
Journal_Title :
Proceedings of the IEEE
DOI :
10.1109/PROC.1983.12646
