• DocumentCode
    969084
  • Title

    A systems approach to 1-µm NMOS

  • Author

    Lepselter, Martin P. ; Alles, David S. ; Levinstein, Hyman J. ; Smith, George Elwood ; Watson, Hugh A.

  • Author_Institution
    Bell Laboratories, Murray Hill, NJ
  • Volume
    71
  • Issue
    5
  • fYear
    1983
  • fDate
    5/1/1983 12:00:00 AM
  • Firstpage
    640
  • Lastpage
    656
  • Abstract
    In 1977, groups from diverse disciplines at Bell Labs were brought together for the first time, with the goal of applying a systems approach to high-performance NMOS technology. These groups, namely, solid-state physics, device design, materials, processing, and lithography found a symbiotic relationship that has produced not only NMOS devices with unparalleled performance, but also improved materials, processes, and tools-many of which are in production today.
  • Keywords
    Conducting materials; Fabrication; Laboratories; Lithography; MOS devices; Scanning electron microscopy; Solid modeling; Solid state circuits; Testing; Transmission electron microscopy;
  • fLanguage
    English
  • Journal_Title
    Proceedings of the IEEE
  • Publisher
    ieee
  • ISSN
    0018-9219
  • Type

    jour

  • DOI
    10.1109/PROC.1983.12646
  • Filename
    1456914
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=969084