DocumentCode
969993
Title
High speed normally-off GaAs MESFET integrated circuit
Author
Katano, F. ; Furutsuka, T. ; Higashisaka, A.
Author_Institution
Nippon Electric Co. Ltd., Basic Technology Research Laboratories, Kawasaki, Japan
Volume
17
Issue
6
fYear
1981
Firstpage
236
Lastpage
237
Abstract
Normally-off GaAs MESFET integrated circuits with a maximum toggle frequency of 2.4 GHz were fabricated by conventional photolithography. The unfavourable effect of the surface depletion layer due to the large state density at the GaAs surface has been reduced by adopting the recessed gate FET structure.
Keywords
III-V semiconductors; Schottky gate field effect transistors; field effect integrated circuits; gallium arsenide; microwave integrated circuits; photolithography; GaAs MESFET integrated circuit; III-V semiconductor; photolithography; recessed gate FET structure; state density; surface depletion layer; toggle frequency;
fLanguage
English
Journal_Title
Electronics Letters
Publisher
iet
ISSN
0013-5194
Type
jour
DOI
10.1049/el:19810167
Filename
4245632
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