DocumentCode
970117
Title
The effect of Fowler-Nordheim tunneling current stress on mobility in n-channel MOSFETs
Author
Akizawa, Mitsuru ; Matsumoto, Satoru
Author_Institution
Dept. of Electr. Eng., Keio Univ., Yokohama, Japan
Volume
35
Issue
2
fYear
1988
fDate
2/1/1988 12:00:00 AM
Firstpage
245
Lastpage
246
Abstract
The electron effective mobility in n-channel MOSFETs has been investigated under Fowler-Nordheim (F-N) tunneling current stress at room temperature. With F-N current stress, mobilities become smaller than of the prestress mobilities over the whole region of inversion carrier density N inv, and the N inv -dependence of the mobility almost disappears
Keywords
carrier mobility; insulated gate field effect transistors; inversion layers; tunnelling; Fowler-Nordheim tunneling current stress; electron effective mobility; inversion carrier density; n-channel MOSFETs; Charge carrier density; Current measurement; Electron mobility; MOS capacitors; MOSFETs; Resistors; Stress; Temperature; Threshold voltage; Tunneling;
fLanguage
English
Journal_Title
Electron Devices, IEEE Transactions on
Publisher
ieee
ISSN
0018-9383
Type
jour
DOI
10.1109/16.2445
Filename
2445
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