Title :
Two-Wavelength Grating Interferometry for MEMS Sensors
Author :
Ferhanoglu, Onur ; Toy, M. Fatih ; Urey, Hakan
Author_Institution :
Koc Univ., Istanbul
Abstract :
Diffraction gratings integrated with micro-electro-mechanical-systems (MEMS) offer shot noise limited sub-nanometer displacement detection sensitivities but are limited in detection range for mechanical transducers. A two-wavelength readout method is developed that maintains high sensitivity while increasing the detection range, which is demonstrated using a MEMS spectrometer with integrated diffraction grating. The two-laser illumination extended the detection range from 105 nm to 1.7mum assuming the readout sensitivity is maintained at >50% of the maximum sensitivity.
Keywords :
diffraction gratings; light interferometry; micro-optomechanical devices; microsensors; optical sensors; shot noise; MEMS sensors; MEMS spectrometer; detection range; integrated diffraction grating; mechanical transducers; microelectromechanical-systems; shot noise limited subnanometer displacement detection sensitivities; two-laser illumination; two-wavelength grating interferometry; two-wavelength readout method; Diffraction gratings; Fingers; Gunshot detection systems; Mechanical sensors; Micromechanical devices; Optical arrays; Optical interferometry; Optical sensors; Sensor arrays; Spectroscopy; Grating interferometry; micro-electro- mechanical-systems (MEMS); optical sensing; two-wavelength interferometry;
Journal_Title :
Photonics Technology Letters, IEEE
DOI :
10.1109/LPT.2007.908450
