Title :
Focused-Ion-Beam Fabrication of Slots in Silicon Waveguides and Ring Resonators
Author :
Schrauwen, Jonathan ; Van Lysebettens, Jeroen ; Claes, Tom ; De Vos, Katrien ; Bienstman, Peter ; Van Thourhout, Dries ; Baets, Roel
Author_Institution :
Dept. of Inf. Technol., Ghent Univ.-IMEC, Ghent
Abstract :
We present the focused-ion-beam fabrication of slots in existing silicon waveguides and racetrack resonators. The etch process was conducted with iodine enhancement and an alumina hard mask. We demonstrate a propagation loss of 100 dB/cm for slot waveguides and a Q value of 850 for slot racetrack resonators with bend radius of 6 mum.
Keywords :
alumina; elemental semiconductors; focused ion beam technology; integrated optics; masks; optical fabrication; optical losses; optical resonators; optical waveguides; silicon; slot lines; sputter etching; Q value; Si; alumina hard mask; etch process; focused-ion-beam fabrication; iodine enhancement; propagation loss; ring resonators; silicon waveguides; slot racetrack resonators; slot waveguides; Focused ion beam; resonator; silicon; slot waveguide;
Journal_Title :
Photonics Technology Letters, IEEE
DOI :
10.1109/LPT.2008.2006001
