1 $,\times,$ 16 Pt/4H-SiC Schottky Photodiode Array for Low-Level EUV and UV Spectroscopic Detection

This letter reports on a 1 times 16 Pt/4H-SiC Schottky photodiode array with a total detection area of 136.5 mm² operating at the wavelength from 400 nm down to 7.5 nm. The array has an ultra low leakage current of 6.4 and 51 fA at -0.4 and -5 V, respectively. In the vacuum ultraviolet (UV) range from 200 nm down to 10 nm, the quantum efficiency (QE) falls to a minimum of 30% at 160 nm, exceeds 100% at wavelengths shorter than 61 nm, and reaches 10 e-/photon at 10 nm, indicating the array has a high sensitivity. The maximum QE in the near UV range is 78% at 230 nm. The spectral detectivity is higher than 1015 cm Hz^1/2/W in the wavelength range from 350 nm down to 7.5 nm. Crosstalk between adjacent pixels is investigated. A UV spectroscopic system using the photodiode array with a fine dispersion resolution of 1.5 nm/pixel has been demonstrated.