Title :
Extremely low-noise MESFETs fabricated by metal-organic chemical vapour deposition
Author :
Kamei, Kentaro ; Kawasaki, Hiroshi ; Chigira, T. ; Nakanisi, T. ; Kawabuchi, K. ; Yoshimi, Masato
Author_Institution :
Toshiba Corporation, Electronics Equipment Division, Kawasaki, Japan
Abstract :
Quarter-micron gate low-noise GaAs MESFETs have been developed by delineating gate electrodes by an electron-beam lithography technique and by using high-purity epiwafers prepared by a metal-organic-chemical vapour deposition (MOCVD) technique. At 18 GHz, a noise figure of 1.75 dB with an associated gain of 8.5 dB and a maximum available gain of 11 dB were obtained at drain currents of 10 mA and 30 mA, respectively. This is the lowest noise figure yet reported for low-noise GaAs MESFETs.
Keywords :
III-V semiconductors; Schottky gate field effect transistors; electron beam lithography; gallium arsenide; vapour phase epitaxial growth; GaAs; MESFET; electron-beam lithography; epiwafers; low noise; metal-organic-chemical vapour deposition;
Journal_Title :
Electronics Letters
DOI :
10.1049/el:19810315