5 x 9 integrated optical star coupler in silicon-on-insulator technology

Author

Trinh, P.D. ; Yegnanarayanan, S. ; Jalali, B.

Author_Institution

Dept. of Electr. Eng., California Univ., Los Angeles, CA, USA

Volume

8

Issue

6

fYear

1996

fDate

6/1/1996 12:00:00 AM

Firstpage

794

Lastpage

796

Abstract

We describe fabrication of the first optical star coupler in silicon-on-insulator (SOI) technology. The 5×9 coupler consists of two silicon rib waveguide arrays with a radiative slab waveguide region. The star geometry was analyzed and designed using the beam propagation method. The coupler exhibits low loss (average excess insertion loss /spl alpha//spl sim/1.3 dB) and good coupling uniformity (standard deviation /spl sigma//spl sim/1.4 dB) at /spl lambda/=1.55 μm. It represents a key component for realization of photonic circuits in a silicon integrated circuit technology.

Keywords

CMOS integrated circuits; geometry; integrated optics; integrated optoelectronics; optical couplers; optical design techniques; optical fabrication; optical losses; optical waveguide theory; optical waveguides; rib waveguides; silicon-on-insulator; 1.3 dB; 1.55 mum; 5/spl times/9 integrated optical star coupler; SOI technology; average excess insertion loss; beam propagation method; good coupling uniformity; low loss; optical star coupler fabrication; photonic circuits; radiative slab waveguide region; silicon integrated circuit technology; silicon rib waveguide arrays; silicon-on-insulator technology; standard deviation; star geometry; Coupling circuits; Electromagnetic coupling; Insertion loss; Integrated optics; Optical coupling; Optical device fabrication; Optical losses; Optical waveguides; Silicon on insulator technology; Slabs;

fLanguage

English

Journal_Title

Photonics Technology Letters, IEEE

Publisher

ieee

ISSN

1041-1135

Type

jour

DOI

10.1109/68.502097

Filename

502097