DocumentCode
972129
Title
Diffusion of transition elements in GaAs and InP
Author
Brozel, M.R. ; Tuck, B. ; Foulkes, E.J.
Author_Institution
University of Nottingham, Department of Electrical & Electronic Engineering, Nottingham, UK
Volume
17
Issue
15
fYear
1981
Firstpage
532
Lastpage
533
Abstract
A technique is presented for studying the diffusion of iron and chromium in GaAs and InP at temperatures down to 600°C. The technique is reproducible, and results are presented which show that in all four cases very fast diffusion occurs.
Keywords
III-V semiconductors; chromium; diffusion in solids; gallium arsenide; indium compounds; iron; semiconductor doping; Cr diffusion; Fe diffusion; GaAs; InP; diffusion of transition elements; semiconductor doping;
fLanguage
English
Journal_Title
Electronics Letters
Publisher
iet
ISSN
0013-5194
Type
jour
DOI
10.1049/el:19810372
Filename
4245846
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