A Micropower Interface ASIC for a Capacitive 3-Axis Micro-Accelerometer

In this paper, a micropower interface IC for a capacitive 3-axis micro-accelerometer implemented in a 0.13- BiCMOS process is presented. The sensor interface consists of a front-end that converts the acceleration signal to voltage, two algorithmic ADCs, two frequency references, and a voltage, current, and temperature reference circuit. Die area and power dissipation are reduced by using time-multiplexed sampling and varying duty cycles down to 0.3%. The chip with a 0.51 active area draws 62 from a 1.8 V supply while sampling temperature at 100 Hz, and four proof masses, each at 1.04 kHz. With a 4-g capacitive 3-axis accelerometer, the measured noise floors in the x-, y-, and z-directions are 482 , 639 , and 662 , respectively.