Title :
On-die diffractive alignment structures for packaging of microlens arrays with 2-D optoelectronic device arrays
Author :
Boisset, G.C. ; Robertson, B. ; Hsiao, W.S. ; Taghizadeh, M.R. ; Simmons, J. ; Song, K. ; Matin, M. ; Thompson, D.A. ; Plant, D.V.
Author_Institution :
Dept. of Electr. Eng., McGill Univ., Montreal, Que., Canada
fDate :
7/1/1996 12:00:00 AM
Abstract :
A novel technique for aligning a microlens array to an electrically packaged optoelectronic device array is presented: reflective Fresnel zone plates (FZP´s) are fabricated on the device die to provide registration spots during alignment. A proof-of-concept experiment in which an MSM array was aligned to a microlens array with an accuracy of better than 9 microns is described.
Keywords :
Fresnel diffraction; arrays; integrated optoelectronics; lenses; light diffraction; packaging; zone plates; 2D optoelectronic device array; MSM array; electrical packaging; microlens array; on-die diffractive alignment; reflective Fresnel zone plate; registration spots; Diffraction; Fresnel reflection; Lenses; Microoptics; Optical arrays; Optical interconnections; Optoelectronic devices; Packaging; Substrates; Throughput;
Journal_Title :
Photonics Technology Letters, IEEE
