Title :
Design, Manufacturing, and Testing of Single-Carbon-Nanotube-Based Infrared Sensors
Author :
Zhang, Jiangbo ; Xi, Ning ; Chen, Hongzhi ; Lai, King Wai Chiu ; Li, Guangyong ; Wejinya, Uchechukwu C.
Author_Institution :
Dept. of Electr. & Comput. Eng., Michigan State Univ., East Lansing, MI
fDate :
3/1/2009 12:00:00 AM
Abstract :
As a 1-D nanostructural material, carbon nanotube (CNT) has attracted lot of attention and has been used to build various nanoelectronic devices due to its unique electronic properties. In this paper, a reliable and efficient nanomanufacturing process was developed for building single-CNT-based nanodevices by depositing the CNTs on the substrate surface and then aligning them to bridge the electrode gap using the atomic force microscopy (AFM) based nanomanipulation. With this technology, single CNT-based IR sensors have been fabricated for investigating CNT´s electronic and photonic properties. The fabrication of single-CNT-based IR sensors demonstrated the reliability and efficiency of the nanomanufacturing process. Experimental tests on single-multiwalled-CNT-based IR sensors have shown much larger photocurrent and quantum efficiency than other reported studies. It has also been shown that a high signal to dark current ratio can be accomplished by single-walled-CNT (SWNT) based IR sensors. Moreover, the testing of SWNT-bundle-based IR sensors verified that the performance of CNT bundle/film-based nanoelectronic devices was limited by the mixing of semiconducting CNTs and metallic CNTs, as well as the unstable CNT-CNT junctions in a CNT bundle or network.
Keywords :
atomic force microscopy; carbon nanotubes; dark conductivity; infrared detectors; nanotechnology; nanotube devices; photoconductivity; reliability; 1-D nanostructural material; AFM; C; atomic force microscopy; dark current; electrode gap; electronic properties; metallic CNTs; nanoelectronic devices; nanomanipulation; nanomanufacturing process; photocurrent; photonic properties; quantum efficiency; reliability; semiconducting CNTs; single-walled carbon-nanotube-based infrared sensors; Atomic force microscopy (AFM); IR sensor; carbon nanotube (CNT); nanomanipulation; nanomanufacturing;
Journal_Title :
Nanotechnology, IEEE Transactions on
DOI :
10.1109/TNANO.2008.2008024