Title :
High frequency ZnO-SiO2-Si surface acoustic wave convolvers
Author :
Melloch, M.R. ; Gunshor, R.L. ; Pierret, R.F.
Author_Institution :
Purdue University, School of Electrical Engineering, West Lafayette, USA
Abstract :
The separate comb grating transducer configuration is used in the fabrication of high frequency convolvers in the metal-ZnO-SiO2-Si surface acoustic wave device structure. A Rayleigh convolver with an operating frequency of 285 MHz and a Sezawa convolver with an operating frequency of 355 MHz are reported.
Keywords :
silicon compounds; surface acoustic wave devices; zinc compounds; 285 MHz; Rayleigh convolver; Sezawa convolver; high frequency convolvers; metal-ZnO-SiO2-Si surface acoustic wave device structure; separate comb grating transducer;
Journal_Title :
Electronics Letters
DOI :
10.1049/el:19810576
