Title :
Design and Fabrication of Monolithic Distributed Traveling-Wave Photodetectors Integrated With Polymer Optical Waveguides
Author :
Kim, Junghwan ; Johnson, William B. ; Kanakaraju, S. ; Cao, Weilou ; Herman, Warren N. ; Lee, Chi H.
Author_Institution :
Maryland Univ., College Park
Abstract :
We have designed and fabricated monolithic distributed balanced traveling-wave metal-semiconductor-metal photodetectors (MSM PDs) distributed along single-mode polymer optical waveguides. We demonstrate that monolithically integrated polymer optical waveguides on a semiconductor can provide efficient optical interconnects in an optoelectronic circuit. A responsivity of 0.44 A/W and a 3-dB bandwidth of 10 GHz were obtained in a PD array with five MSM PDs. A high photocurrent of 7.3 mA was measured in an array having eight MSM PDs. Impulse response measurements were performed and the results were compared with frequency domain results.
Keywords :
distributed sensors; integrated optoelectronics; optical interconnections; optical waveguides; photoconductivity; photodetectors; transient response; bandwidth 10 GHz; current 7.3 mA; impulse response measurements; metal-semiconductor-metal photodetectors; monolithic distributed photodetectors; optical interconnects; optoelectronic circuit; photocurrent; polymer optical waveguides; traveling-wave photodetectors; Bandwidth; Circuits; Integrated optics; Optical design; Optical device fabrication; Optical interconnections; Optical polymers; Optical waveguides; Photodetectors; Semiconductor waveguides; Integrated optoelectronics; metal–semiconductor–metal (MSM) devices; photodetectors (PDs); traveling-wave devices;
Journal_Title :
Electron Devices, IEEE Transactions on
DOI :
10.1109/TED.2007.908548
