Title :
Electron optical synthesis and optimization
Author :
Szilagyi, Mike N.
Author_Institution :
University of Arizona, Tucson, AZ, USA
fDate :
3/1/1985 12:00:00 AM
Abstract :
A novel approach to electron/ion optical synthesis and optimization is presented. Low-aberration field distributions are sought by dynamic programming or optimal control procedures in the form of continuous curves constructed of cubic splines. A very simple algorithm is proposed for the reconstruction of the electrodes or pole-pieces. High-quality electrostatic lens designs are shown as practical examples.
Keywords :
Electron beams; Electron optics; Electrostatics; Focusing; Ion beams; Lenses; Magnetic fields; Optical refraction; Optical sensors; Particle beam optics;
Journal_Title :
Proceedings of the IEEE
DOI :
10.1109/PROC.1985.13165
