• DocumentCode
    974502
  • Title

    Hall-effect measurements on short-channel devices using the van der Pauw Dual technique

  • Author

    Andreou, A.G. ; Westgate, Charles R.

  • Volume
    73
  • Issue
    3
  • fYear
    1985
  • fDate
    3/1/1985 12:00:00 AM
  • Firstpage
    489
  • Lastpage
    490
  • Abstract
    The van der Pauw dual technique is used to perform in situ Hall-effect measurements on short-channel GaAs field-effect transistors (GaAs FETs). The technique is briefly described and some practical and theoretical problems associated with this technique are discussed.
  • Keywords
    Charge carriers; Charge measurement; Computer aided analysis; Current measurement; FETs; Geometry; Hall effect; Magnetic field measurement; Performance evaluation; Voltage;
  • fLanguage
    English
  • Journal_Title
    Proceedings of the IEEE
  • Publisher
    ieee
  • ISSN
    0018-9219
  • Type

    jour

  • DOI
    10.1109/PROC.1985.13170
  • Filename
    1457438