Title :
Nonlinear effects and anomalous transport in RF plasmas
Author :
Chen, Francis F.
Author_Institution :
California Univ., Los Angeles, CA
fDate :
6/1/2006 12:00:00 AM
Abstract :
Three examples are given of experiments which give evidence of nonclassical behavior in partially ionized, low-temperature, radio-frequency plasmas: anomalous skin depth in inductively coupled plasmas, transport by fluctuations in helicon plasmas, and parametric instabilities in helicon plasmas. A variety of physics puzzles have been found in industrial plasmas, and techniques learned from high-temperature, fusion research are used to solve them. Low-temperature plasma physics is becoming a precise, challenging discipline in the field of plasmas
Keywords :
high-frequency discharges; parametric instability; plasma fluctuations; plasma nonlinear processes; plasma sources; plasma temperature; plasma transport processes; RF plasmas; anomalous skin depth; anomalous transport; fluctuations; helicon plasmas; high-temperature fusion research; inductively coupled plasmas; industrial plasmas; nonlinear effects; parametric instabilities; partially ionized low-temperature plasmas; radiofrequency plasmas; Plasma applications; Plasma confinement; Plasma density; Plasma diagnostics; Plasma sheaths; Plasma sources; Plasma transport processes; Plasma waves; Radio frequency; Skin; Anomalous skin depth; Kelvin–Helmholtz instability; anomalous transport; drift wave instability; helicon discharges; helicon sources; inductively coupled plasma; low-temperature plasma; nonlinear; parametric; radio-frequency plasma; transport barrier;
Journal_Title :
Plasma Science, IEEE Transactions on
DOI :
10.1109/TPS.2006.874851
