Title :
Experimental and theoretical study of RF plasma at low and high frequency
Author :
Rakhimova, Tatyana V. ; Braginsky, Oleg V. ; Ivanov, Vladimir V. ; Kim, T.-K. ; Kong, J.-T. ; Kovalev, Alexander S. ; Lopaev, Dmitriy V. ; Mankelevich, Yuri A. ; Proshina, Olga V. ; Vasilieva, Anna N.
Author_Institution :
Inst. of Nucl. Phys., Lomonosov Moscow State Univ.
fDate :
6/1/2006 12:00:00 AM
Abstract :
A capacitive coupled radio-frequency plasma at argon pressure of 100 mtorr, 13.56 and 81 MHz frequency and high specific input powers has been studied both experimentally and theoretically. The different numerical models were developed and used for simulation. It was shown that the main ionization source in low frequency (LF) discharge at all studied powers is due to secondary electrons emitted from the electrode by ion impact. The high-frequency (HF) discharge at the same powers is operated in alpha-mode. Applicability of fluid and kinetic models for simulation of LF and HF discharges are studied on the base of our experimental data
Keywords :
argon; high-frequency discharges; ionisation; plasma kinetic theory; plasma simulation; plasma sources; plasma-wall interactions; secondary electron emission; 100 mtorr; 13.56 MHz; 81 MHz; Ar; capacitive coupled radiofrequency plasma; electrode; fluid model; high-frequency discharge; ion impact; ionization source; kinetic model; low frequency discharge; plasma simulation; secondary electron emission; Argon; Electrodes; Electron emission; Fault location; Hafnium; Ionization; Numerical models; Plasma simulation; Plasma sources; Radio frequency; Capacitive coupled radio-frequency plasma; high specific power; low frequency (LF) and high frequency (HF) plasma; particle-in-cell (PIC) simulation;
Journal_Title :
Plasma Science, IEEE Transactions on
DOI :
10.1109/TPS.2006.875849
