Detailed numerical investigation of a DC sputter magnetron

Author

Kolev, Ivan ; Bogaerts, Annemie

Author_Institution

Res. Group PLASMANT, Univ. of Antwerp, Wilrijk

Volume

34

Issue

3

fYear

2006

fDate

6/1/2006 12:00:00 AM

Firstpage

886

Lastpage

894

Abstract

A self-consistent two-dimensional in coordinate space and three-dimensional in velocity space (2d3v) numerical model based on the particle-in-cell-Monte Carlo collisions technique is developed to study the processes in direct current sputter magnetrons. The model also includes modules for the transport of the sputtered atoms and the gas heating. The main discharge characteristics such as the electrical potential, the density distributions of all plasma species, the gas temperature distribution, and the erosion profile are presented and compared to experimental data, whenever available

Keywords

Monte Carlo methods; high-frequency discharges; plasma collision processes; plasma density; plasma heating; plasma simulation; plasma sources; plasma temperature; plasma transport processes; DC sputter magnetron; atom transport; coordinate space; density distributions; discharge characteristics; electrical potential; erosion profile; gas heating; gas temperature distribution; particle-in-cell-Monte Carlo collisions technique; velocity space; Cathodes; Equations; Heating; Magnetic fields; Magnetic flux; Numerical models; Plasma density; Plasma simulation; Plasma transport processes; Pulsed power supplies; Gas heating; magnetron; modeling; particle-in-cell (PIC); sputtering;

fLanguage

English

Journal_Title

Plasma Science, IEEE Transactions on

Publisher

ieee

ISSN

0093-3813

Type

jour

DOI

10.1109/TPS.2006.875843

Filename

1643316