DocumentCode
977522
Title
Determination of spatial surface state density distribution in MOS and SIMOS transistors after channel hot electron injection
Author
Maes, H.E. ; Groeseneken, Guido
Author_Institution
Katholieke Universiteit Leuven, ESAT Laboratory, Heverlee, Belgium
Volume
18
Issue
9
fYear
1982
Firstpage
372
Lastpage
374
Abstract
The charge pumping technique has been adapted for the determination of the spatial distribution of the interface state density in the channel region of short channel MOS or SIMOS transistors. This spatial distribution is shown to be modified by channel hot electron injection and provides information on the location and width of the injection region.
Keywords
electronic density of states; hot carriers; insulated gate field effect transistors; interface electron states; MOS transistor; SIMOS transistors; channel hot electron injection; charge pumping technique; interface state density; spatial surface state density distribution; stacked gate injection MOS transistor;
fLanguage
English
Journal_Title
Electronics Letters
Publisher
iet
ISSN
0013-5194
Type
jour
DOI
10.1049/el:19820255
Filename
4246388
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