Title :
Alpha particle emission from platinum and its influence on DRAM operation
Author :
Numata, K. ; Aoki, Kazuo ; Fukuda, Yukikatsu ; Nishimura, Akira ; Schleisman, A.
Author_Institution :
ULSI Dev. & Prod., Texas Instrum. Japan, Ibaragi-ken, Japan
Abstract :
Ferroelectrics such as SrTiO3 have been studied as DRAM capacitor insulators. Platinum is commonly used as their electrode material. However, platinum contains the isotope Pt190, emitting alpha particles which cause soft errors. The authors measured the alpha particle emissivity of platinum coated silicon wafers. The resultant emissivity is consistent with the calculation. The impact on DRAM operation was estimated.
Keywords :
DRAM chips; VLSI; alpha-particle effects; ferroelectric storage; insulating thin films; platinum; DRAM capacitor insulators; DRAM operation; Pt coated Si wafers; Pt-Si; Pt 190; SrTiO 3; alpha particle emission; alpha particle emissivity; electrode material; ferroelectrics; radioactive isotope; soft errors;
Journal_Title :
Electronics Letters
DOI :
10.1049/el:19931403