A Constant-Mobility Method to Enable MOSFET Series-Resistance Extraction

A new method of extracting the MOSFET series resistance is proposed. This method requires only simple dc measurements on a single test device. Experimental demonstration is presented, without requiring quantities such as gate-oxide thickness, physical gate length, or effective channel length. The merit of the method stems from the specifically arranged bias conditions in which the channel carrier mobility remains constant for high vertical electric fields. It is this unique property which makes the proposed method suitable for short-channel devices.