Title :
Thermo-optically controlled ring resonator on silicon
fDate :
5/23/1996 12:00:00 AM
Abstract :
A temperature controlled integrated optical ring resonator processed on a silicon substrate is studied using integrated polysilicon heater and thermistor elements. The response speed of the optical 2π phase shift is evaluated as the surface temperature of the device is measured with the thermistor. The effect of an applied heat sink on the device operation is studied
Keywords :
elemental semiconductors; integrated optics; optical resonators; silicon; thermistors; thermo-optical effects; Si; applied heat sink; device operation; integrated polysilicon heater; optical 2π phase shift; response speed; silicon; silicon substrate; surface temperature; temperature controlled integrated optical ring resonator; thermistor; thermistor elements; thermo-optically controlled ring resonator;
Journal_Title :
Electronics Letters
DOI :
10.1049/el:19960640
