DocumentCode
979976
Title
Leaky SAW velocity on water/silicon boundary measured by acoustic line-focus beam
Author
Kushibiki, J. ; Horii, K. ; Chubachi, N.
Author_Institution
Tohoku University, Department of Electrical Engineering, Faculty of Engineering, Sendai, Japan
Volume
18
Issue
17
fYear
1982
Firstpage
732
Lastpage
734
Abstract
Propagation characteristics of leaky SAWs at the boundary of water/silicon are investigated by the nonscanning reflection acoustic microscope using a line-focus beam. Experiments are performed for typical crystalline planes of silicon such as (111), (110), (001) and slightly inclined (111). These results obtained by the line-focus beam are compared to the experimental results obtained by the conventional point-focus beam.
Keywords
acoustic wave velocity; silicon; surface acoustic waves; water; acoustic line-focus beam; leaky SAW velocity; nonscanning reflection acoustic microscope; propagation characteristics; water/Si boundary;
fLanguage
English
Journal_Title
Electronics Letters
Publisher
iet
ISSN
0013-5194
Type
jour
DOI
10.1049/el:19820497
Filename
4246736
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