Optimizing Pulsed OBIC Technique for ESD Defect Localization

Author

Essely, Fabien ; Guitard, Nicolas ; Darracq, Frédéric ; Pouget, Vincent ; Bafleur, Marise ; Perdu, Philippe ; Touboul, André ; Lewis, Dean

Author_Institution

STMicroelectron., Rousset

Volume

7

Issue

4

fYear

2007

Firstpage

617

Lastpage

624

Abstract

This paper presents a study of the well-known optical beam-induced current (OBIC) technique applied to electrostatic-discharge defect localization. The OBIC technique is improved by using a pulsed laser beam instead of a continuous one. Critical parameters of the experimentation are explored in this paper. We particularly discuss on the influence of the laser energy, the bias of the device under test and the spatial resolution of the technique.

Keywords

OBIC; electrostatic discharge; integrated circuit testing; ESD defect localization; electrostatic-discharge defect localization; laser energy; optical beam-induced current technique; optimizing pulsed OBIC technique; pulsed laser beam; spatial resolution; Electrostatic discharge; Inverters; Laboratories; Laser beams; Optical beams; Optical pulses; Optical sensors; Spatial resolution; Stimulated emission; Testing; Electrostatic discharge (ESD) defect; influence of experimental parameter; not given; pulsed optical beam-induced current (OBIC);

fLanguage

English

Journal_Title

Device and Materials Reliability, IEEE Transactions on

Publisher

ieee

ISSN

1530-4388

Type

jour

DOI

10.1109/TDMR.2007.911381

Filename

4384469