Superconducting properties of reactively sputtered NbCN thin films

Author

Francavilla, T.L. ; Wolf, S.A. ; Skelton, E.F. ; Francavilla, T. ; Wolf, Stefan ; Skelton, E.

Author_Institution

Naval Research Laboratory, Washington, DC

Volume

17

Issue

1

fYear

1981

fDate

1/1/1981 12:00:00 AM

Firstpage

569

Lastpage

572

Abstract

Niobium Carbonitride thin films have been prepared by rf reactive sputtering of niobium in ar argon, reactive-gas (RG) atmosphere where the RG is a mixture of cyanogen and nitrogen. Film composition ranged from Nb1CxN1-x( $0.03\\leq \\times \\leq0.5$ ) as determined by Auger analysis, the carbon content roughly tracking the cyanogen partial pressure. Composition and substrate temperature were systematically varied and the resultant films studied by measurements of x-ray structure, resistivity, superconducting transition temperature Tc, and critical magnetic fields. We have found systematic preferential orientation of the crystallites in these films depending upon substrate temperature ana RG to argon ratio. Increasing either quantity causes the crystallites to reorient from the

Keywords

Sputtering; Superconducting materials; Argon; Magnetic field measurement; Magnetic films; Niobium; Roentgenium; Sputtering; Substrates; Superconducting films; Superconducting thin films; Superconducting transition temperature;

fLanguage

English

Journal_Title

Magnetics, IEEE Transactions on

Publisher

ieee

ISSN

0018-9464

Type

jour

DOI

10.1109/TMAG.1981.1061147

Filename

1061147